Pressure chip

Product Features ● Flip-chip packaging ● High reliability ● Piezoresistive effect ● Absolute pressure measurement ● Leadless packaging ● Resistance vacuum chamber shielding ● Can be applied to liquid and gas pressure measurement

+86-311-83933866

jl.dong@mtmems.com

Product Classification:

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Performance metrics

All specifications are measured at 25℃ with a 5VDC supply, unless otherwise specified.

Parameter	Minimum value	Typical value	Maximum value	Unit	Note
Measurement range	--	1M	--	Pa
	--	2.5M	--	Pa
	--	5M	--	Pa
Bridge arm resistance	5	6	7	kΩ
Zero-point output	-30	0	+ 30	millivolt
Full-scale output	70	100	130	millivolt
Nonlinear	0	0.20	0.30	%FSO	1
Hysteresis under pressure	0	0.05	0.10	%FSO	1
Non-repetitive	0	0.10	0.20	%FSO	1
TCR (Temperature Coefficient of Resistance of Bridge Arm)	0.08	0.10	0.12	%/°C	2
TCS (Temperature Coefficient of Sensitivity)	-0.23	-0.20	-0.17	%FSO/℃	2
TCO (Zero-Point Temperature Coefficient)	-0.05	±0.03	+ 0.05	%FSO/℃	2
Temperature hysteresis	-0.2	--	+ 0.2	%FSO	2
Long-term stability	-0.2	---	+ 0.2	%FSA/year
Overload pressure	6x			Measurement range
Burst pressure	10x			Measurement range
Application temperature	-40	---	+ 140	Celsius
Storage temperature	-55	---	+ 150	Celsius
Supply voltage	---	5	15	V
Supply current	---	1	3	mA