Product Application
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Telephone:+86-311-83933866
E-mail:jl.dong@mtmems.com
Address:No.1, Meitai Road, Luquan District, Shijiazhuang City
MEMS three-axis accelerometer
Product Features
● Three-axis single-chip integration
● Sealed design, highly versatile
● Small in size and lightweight
● Low noise
● Wide frequency response and ultra-low-frequency characteristics
● Wide operating temperature range
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Product Classification:
Performance metrics
| Performance parameters | Unit | MSV300-02 | Minus 15 | -50 | -150 | -200 |
| Measurement range | g | ±02 | ±15 | ±50 | ±150 | ±200 |
| Bandwidth (±5%) | Hertz | 500 | 1000 | 1500 | 3000 | 3000 |
| Resonant frequency | kHz | XY: 4.8; | XY: 4.8; | XY: 8.1; | XY: 13.9; | XY: 13.9; |
| Z: 3.5 | Z: 3.5 | Z: 5 | Z: 10 | Z: 10 | ||
| In-band noise density | ug/√Hz | 5 | 5 | 5 | 10 | 10 |
| Bias | V | 2.5 ± 0.05 | 2.5 ± 0.05 | 2.5 ± 0.05 | 2.5 ± 0.05 | 2.5 ± 0.05 |
| Typical value of bias-year stability | mg,typ | 1.5 | 10 | 37.5 | 100 | 150 |
| (Maximum) | (max) | (<5) | (<25) | (<125) | (<250) | (<500) |
| Bias repeatability | mg | <0.2 | <1 | <4 | <12 | <15 |
| Temperature Coefficient of Bias | mg/℃ | <0.2 | <1.2 | <5 | <15 | <20 |
| Sensitivity | mV/g | 1000 ± 8 | 133.3 ± 5 | 40 ± 1 | 13.3 ± 1 | 10 ± 1 |
| Typical value of annual stability for sensitivity | parts per million | 300 | 300 | 300 | 300 | 300 |
| (Maximum) | -1000 | -1000 | -1000 | -1000 | -1000 | |
| Temperature Coefficient of Sensitivity | ppm/℃ | 200 | 200 | 200 | 200 | 200 |
| Cross-coupling | mrad(max) | <10 | <10 | <10 | <10 | <10 |
| %max | <1 | <1 | <1 | <1 | <1 | |
| Resolution | mg | 1 | 1 | 1.5 | 3 | 3 |
| Nonlinear | %FS(max) | <0.3 | <0.3 | <0.3 | <0.3 | <0.3 |
| Impact | g | 20000 | ||||
| Vibration | Hertz | 20 g RMS, 20–2000 Hz (random noise, 30 min per direction) | ||||
| Electrostatic Level | Class 2 (MIL-STD-833-G,1 Method 3015.7), HBM 2kV | |||||
| Power consumption | mW | 50 | ||||
| External dimensions | mm3 | 6×6×1.9 | ||||
| Package form | Ceramic package (LCC16) | |||||
| Output format | Analog voltage output | |||||
| Operating temperature | Celsius | -55℃~125℃ | ||||
| Storage temperature | Celsius | -55℃~125℃ | ||||
| Weight | gram | <1 | ||||
| Aerospace, aviation, weaponry, rail transit, vibration testing of product structures, modal analysis, health monitoring, and more. | ||||||
| Pin | Definition | Instructions | ||||
| 1 | ORG_Vout_x | X-axis reverse output | ||||
| 2 | Vout_x | X-axis output | ||||
| 3 | ORG_Vout_z | Z-axis reverse output | ||||
| 4 | Vout_z | Z-axis output | ||||
| 5 | VSS | Earth | ||||
| 6 | VDD | Power supply | ||||
| 7 | ORG_Vout_y | Y-axis reverse output | ||||
| 8 | Vout_y | Y-axis output | ||||
| 12 | VDD_ref | Connect to the 6-pin power supply when in use. | ||||
| 14 | Fsource | Connect to the 5-pin ground when using. | ||||
| 16 | PTATV | Temperature output |
Application fields

● Aerospace, aviation, weaponry, rail transit, structural vibration testing, modal analysis, health monitoring, and more
Main dimensions and interface definitions

| Pin | Definition | Instructions |
| 1 | ORG_Vout_x | X-axis reverse output |
| 2 | Vout_x | X-axis output |
| 3 | ORG_Vout_z | Z-axis reverse output |
| 4 | Vout_z | Z-axis output |
| 5 | VSS | Earth |
| 6 | VDD | Power supply |
| 7 | ORG_Vout_y | Y-axis reverse output |
| 8 | Vout_y | Y-axis output |
| 12 | VDD_ref | Connect to the 6-pin power supply when in use. |
| 14 | Fsource | Connect to the 5-pin ground when using. |
| 16 | PTATV | Temperature output |
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