Product Application
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Telephone:+86-311-83933866
E-mail:jl.dong@mtmems.com
Address:No.1, Meitai Road, Luquan District, Shijiazhuang City
Triaxial micro-accelerometer
Product Features
● Small size
● Low noise
● Wide operating temperature range
● Wide frequency response
●Sealed design
● Good stability
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Product Classification:
Performance metrics
| Performance parameters | Unit | MSA300D-05 | MSA300D-15 | MSA300D-30 | MSA300D-50 | MSA300D-100 | MSA300D-200 |
| Measurement range | g | ±5 | ±15 | ±30 | ±50 | ±100 | ±200 |
| Zero bias | mg | ≤20 | ≤50 | ≤50 | ≤50 | ≤50 | ≤50 |
| Scale factor | LSB/g | 149,800~150,200 | 198,000~202,000 | 98,000~102,000 | 58,000~62,000 | 28,000–32,000 | 13,000–17,000 |
| Zero-bias linearity | mg | ≤0.1/0.1 | ≤0.3/0.2 | ≤0.4/0.3 | ≤0.5/0.4 | ≤1/0.8 | ≤2/~ |
| Zero-bias repeatability | mg | ≤0.1/0.1 | ≤0.3/0.2 | ≤0.4/0.3 | ≤0.5/0.4 | ≤1/0.8 | ≤2/~ |
| Zero-bias temperature coefficient | mg/℃ | ≤0.2 | ≤0.5 | ≤0.5 | ≤0.5 | ≤1.5 | ≤1.5 |
| Scale factor repeatability | parts per million | ≤100 | ≤100 | ≤100 | ≤200 | ≤500 | ≤500 |
| Scale factor stability | parts per million | ≤100 | ≤100 | ≤100 | ≤200 | ≤500 | ≤500 |
| Temperature coefficient of the scale factor | ppm/°C | ≤100 | ≤100 | ≤300 | ≤300 | ≤600 | ≤100 |
| Nonlinear scale factor | %FS | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 |
| Cross-coupling | % | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Bandwidth | HZ | 5~300 | 5 to 500 | 5 to 500 | 5 to 500 | 5 to 500 | 5 to 500 |
| Resolution | mg | ≤0.2 | ≤0.5 | ≤0.5 | ≤0.8 | ≤1 | ≤1.2 |
| External dimensions | mm × mm × mm | 6.0 × 6.0 × 1.9 | |||||
| Encapsulation | Ceramic package (LCC16) | ||||||
| Output format | SPI digital output | ||||||
| Operating voltage range | V | 4.9–5.1 (typical value: 5) | |||||
| Operating temperature | Celsius | -45~85 | |||||
| Storage temperature | Celsius | -55~125 | |||||
Application areas

● Inertial measurement: inertial guidance, integrated navigation, overload measurement
● Tilt measurement: antenna attitude measurement, platform measurement, and tilt angle testing
● Vibration measurement: mechanical equipment, bridges and dams, safety testing
Main dimensions and interface definitions

| Pin number | Definition | Instructions |
| 1 | GND | Earth |
| 2 | DVD-D | Chip Digital Power |
| 3 | VDDIO | Chip digital I/O power supply (1.7V ~ VDD) |
| 4 | SCLK | SPI Clock |
| 5 | DOUT | SPI MISO |
| 6 | DIN | SPI MOSI |
| 7 | SSB | SPI Slave Selection |
| 8 | EN | Chip enable, 5V high-level active |
| 10 | GND | Earth |
| 12 | HVREF | High-voltage reference |
| 13 | GND | Earth |
| 14 | ADCREF | ADC reference voltage |
| 15 | DVD-D | Chip Digital Power |
| 9 11 16 | NC | Not connected |
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